
Materials Research Group
The Materials Research Group is made up of faculty and students from the departments of Mechanical Engineering, Physics, Chemistry, and Chemical Engineering with research interests in the broad field of materials science and engineering. The group includes 8 faculty members and about 20 graduate students and holds a weekly group meeting where the graduate student members and guest speakers present their research results.
Capabilities Characterization

FEI Helios NanoLab 600 DualBeam SEM/FIB
- Electron beam (SEM) from Elstar electron column with FEG source
- Insertable detectors for vCD (backscattered electrons) and for transmission scanning electron imaging with the TSEM detector
- Galllium ion beam (FIB)
- Electrodispersive X-ray spectroscopy (EDXS) detector
- Gas injection system (GIS)
- Cryo stage
Quanta ESEM
- High Vacuum mode for SEI with ETD
- Low Vacuum (ESEM) mode for SEI with LFD
- GAD (Gaseous Absorption Detector) for BSI in the low vacuum mode. Low voltage GAD has additional x-ray cone w/500 um PLA which seals to the objective polepiece.

Xenocs SAXS/WAXS
- Cu kα x-ray source with a collimated x-ray beam and 2D CCD detector
- Q-range of approximately 0.008 Å-1 to 3.0 Å-1 (depends on sample)
- Sample stages for solids, liquids, powders, and gels
- Couette shear stage for non-Newtonian fluids
- Grazing-Incidence (GI) stage for thin film analysis
- Peltier temperature control stage (10°C – 150°C)
Sensofar 3D non-contact optical 3D profile
S-Neox, which includes a high-resolution CCD sensor of up to 1360×1024 pixels in combination with high resolution displays of 2560×1440.
Contact: Miriam Belmaker, Harwell Hall, Room 109

Artec Micro
Desktop 3D scanner with a point accuracy of up to 10 microns and a NextEngine 3D laser scanner with a 0.005-inch accuracy
Contact: Miriam Belmaker, Harwell Hall, Room 109
Rigaku SmartLab (XRD, HRXRD and Reciprocal Space Mapping, SAXS)
AFM
Microprobe
GC/MS
ICP

DSC 2500
TGA
Spectroscopic ellipsometer (FilmSense FS1X)
Photoluminescence
Raman Spectrometer
Carrier life-time spectrometer
Quantum efficiency measurements
NMR desktop system Hall effect measurements
Processing

Laboratory High Temperature Furnace Carbolite GERO (www.carbolite-gero.com)
model: LHTG 100-200/22 semi-automatic with maximum temperature of 2200 ˚C and graphite heating elements and insulation material
Ultra-high vacuum rf-magnetron sputtering system with four 2-inch sputtering guns for off-axis sputtering of oxides, and one 1-inch sputtering gun for metal coating.

Veeco Savannah S200 atomic layer deposition (ALD)
- Quart-crystal microbalance (QCM)
- Capacity for 8-inch wafers
- Six precursor lines, with heating
- Stop valve on exhaust line for exposure mode
- Delivery system for liquid and solid low-vapor-pressure precursors (LVPD kit)